CONTACT
sentronics metrology GmbH
Dudenstr. 27-35
68167 Mannheim
Fon: +49 621 84251-0
Fax: +49 621 84251-200
info@sentronics-metrology.de
Key points
Measuring instrument StraDex t is suitable for this.
The measurement instrument evaluates the thickness of up to 4 thin layer down to 5 nm either on test windows of a product wafer or all over blanked wafer. On blanked wafer it generates full wafer maps and calculates the Total Thickness Variation of thin layers.