The automation software for all SemDex metrology tools is called ICE300.
ICE300 operates with MS Windows 10 platforms.
ICE300 supports 300 mm and 200 mm wafer host connectivity and covers the SEMI standards: E5, E30 (GEM), E37, E39, E40 and E94.
ICE300 supports sorting strategies and result based sorting strategies as well as over head transportation loading according to SEMI E84 and Carrier Management (CMS) according to SEMI E87.
The software comes with pluggable user interface controls for equipment status, operator control, process program transfer, terminal services. It includes diagnostic support including a user defined logging interface.