WaferSpect 5.1 is the latest metrology software for every SemDex metrology tool.
The program 5.1 operates with MS Windows 10 platforms.
WaferSpect supports all measuring instruments and provides precise results in the following areas:
- Analysis views for statistics
- Profile metrology
- Bow and warp calculation
- Flatness calculation
- Stress calculation
- Topography and roughness calculation
- Bump and via dimensioning
- Pattern recognition with fiducial recognition
- Global wafer alignment
WaferSpect includes many metrology filters such as averaging, outlier, stage correction, down sampling, linear trend subtraction, drift compensation, cut-off wavelength, and more. The results can be viewed in form of a histogram, 2D, 3D plot or false color presentations.
Result and measurement data can be exported via standard file formats or SECS/GEM protocols.