WaferSpect

WaferSpect 5 is the latest metrology software for every SemDex metrology tool.

The program 5 operates with MS Windows 10 platforms.

WaferSpect supports all measuring instruments and provides precise results in the following areas:

• Analysis views for statistics
• Profile metrology
• Bow and warp calculation
• Flatness calculation
• Stress calculation
• Topography and roughness calculation
• Bump and via dimensioning
• Pattern recognition with fiducial recognition
• Global wafer alignment

WaferSpect includes many metrology filters such as averaging, outlier, stage correction, down sampling, linear trend subtraction, drift compensation, cut-off wavelength, and more. The results can be viewed in form of a histogram, 2D, 3D plot or false color presentations.

Result and measurement data can be exported via standard file formats or SECS/GEM protocols.