WaferSpect 5.1 is the latest metrology software for every SemDex metrology tool.
The program 5.1 operates with MS Windows 10 platforms.
WaferSpect supports all measuring instruments and provides precise results in the following areas:
Analysis views for statistics
Bow and warp calculation
Topography and roughness calculation
Bump and via dimensioning
Pattern recognition with fiducial recognition
Global wafer alignment
WaferSpect includes many metrology filters such as averaging, outlier, stage correction, down sampling, linear trend subtraction, drift compensation, cut-off wavelength, and more. The results can be viewed in form of a histogram, 2D, 3D plot or false color presentations.
Result and measurement data can be exported via standard file formats or SECS/GEM protocols.