Cartesian Stage

The Cartesian Stage is a 2-axle, numeric controlled machine table between the top and bottom of the measuring instruments that moves the wafer in x-y direction.

Its large aperture enables full access to a 300 mm wafer from the bottom side. The Cartesian Stage is equipped with a vacuum wafer chuck. There are many different wafer chucks available for different kind of wafers, measurement tasks and types of resistivity such as discharging, insulating and conducting.

Typical metrology applications for the Cartesian Stage are universal applications with different measuring instruments and sequential area scans.