SemDex 301 is a semi-automated wafer metrology tool developed for the semiconductor industry to provide process reliability and quality assurance.
While wafer handling is manual the metrology part performs automatically.
SemDex 301 contains multiple optical measuring instruments to measure geometric dimensions of wafers, microchips, as long as they are part of the wafer. The metrology tool also evaluates sub-structures of a microchip either if they are manufactured in front-end-of-line (FEOL), back-end-of-line (BEOL) or in Advanced Packaging processes.
The tool has been designed for all semiconductor fab’s in the world according to SEMI standards. It replaces single metrology table tops in all fab’s and provides added value due to its combined measurement strategies.
The technology of the measuring instruments inside is based on optical interferometry, reflectometry and also on microscopic techniques.
SemDex 301 is connecting the whole metrology via SECS/GEM to the fab host.