SemDex M1 is a semi-automated wafer metrology tool developed for the semiconductor industry to provide process reliability and quality assurance.
While wafer handling is manual the metrology part performs automatically. SemDex M1 is more or less the successor product of SemDex 301.
SemDex M1 contains multiple optical measuring instruments to measure geometric dimensions of wafers, microchips, as long as they are part of the wafer. The metrology tool also evaluates sub-structures of a microchip either if they are manufactured in front-end-of-line (FEOL), back-end-of-line (BEOL) or in Advanced Packaging processes.
The tool has been designed for all semiconductor fab’s in the world according to SEMI standards. It replaces single metrology table tops in all fab’s and provides added value due to its combined measurement strategies.
The technology of the measuring instruments inside is based on optical interferometry, reflectometry and also on microscopic techniques.
SemDex M1 automates all metrology wafer handling for any kind of wafer size (wafer diameter from 100 mm to 330 mm) and type (blanked and patterned, bonded, taped and framed wafer) and connects the whole metrology via SECS/GEM to the fab host.